Method for manufacturing semiconductor device and apparatus ther

Details Method for manufacturing semiconductor device and apparatus ther Method for manufacturing semiconductor device and apparatus ther

1987-06-05

1988-02-02

Ruggiero, Joseph

Boots, shoes, and leggings

356400, 356401, 364490, G01B 1100

Patent

active

047232218

ABSTRACT:
A process and an apparatus for positioning a substrate provided with at least an alignment mark (reference pattern) and other patterns irrelevant to the alignment such as circuit patterns, are featured by obtaining photoelectric signals corresponding to the pattern distribution in a scanning area extending over a determined length in a scan direction crossing said reference pattern at a determined angle and containing the reference pattern, identifying that a photoelectric signal satisfying at least a condition in the scan direction is generated by the reference pattern and aligning the substrate according to thus identified photoelectric signal.

REFERENCES:
patent: 4233625 (1980-11-01), Altman
patent: 4325077 (1982-04-01), Dunham
patent: 4423959 (1984-01-01), Nakazawa et al.
patent: 4553845 (1985-11-01), Kuroki et al.
patent: 4563094 (1986-01-01), Yamada

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