Method for manufacturing reflective spatial light modulator...

Details Method for manufacturing reflective spatial light modulator... Method for manufacturing reflective spatial light modulator...

2005-01-11

2005-01-11

Mills, Gregory (Department: 1763)

Etching a substrate: processes

Forming or treating optical article

C438S029000

Reexamination Certificate

active

06841081

ABSTRACT:
A method for manufacturing reflective spatial light modulator mirror devices is disclosed. In the method, a portion of a mirror layer and a first sacrificial layer beneath the portion of the mirror layer are removed simultaneously to expose the substrate while defining a pattern of the mirror layer. Then, a second sacrificial layer is deposited conformally, and substrate contact openings and a mirror layer contact opening are defined in the second sacrificial layer at the same time. Subsequently, a support material layer is deposited conformally and etched back, so as to form supporting posts of the mirror layer in the substrate contact openings. Before the support material layer is etched back, the substrate contact openings can be filled with a photoresist material first, so as to maintain the support material layer in the substrate contact openings and increase the structural intensity of the supporting posts.

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