Method for manufacturing quartz oscillator

Details Method for manufacturing quartz oscillator Method for manufacturing quartz oscillator

2007-03-27

2007-03-27

Alanko, Anita (Department: 1765)

Etching a substrate: processes

Forming pattern using lift off technique

C216S041000, C216S049000, C216S056000, C216S083000, C216S097000, C430S312000, C430S319000

Reexamination Certificate

active

10853504

ABSTRACT:
A method for manufacturing quartz oscillators is provided which permits quartz oscillators having an oscillation frequency, as designed, to be obtained with small variation of individual oscillation frequency and with high reliability. The method for manufacturing quartz oscillators according to the present invention comprises the steps of forming a first resist layer (300) on one surface of a quartz substrate (100), exposing said first resist layer to light of a first amount of exposure to form a patterned first masking layer (210), forming a second resist layer (400) on the other surface of said quartz substrate, exposing said second resist layer to light of a second amount of exposure via said quartz substrate to form a patterned second masking layer (410) by using said first masking layer, and etching said quartz substrate to form quartz pieces (150) by using said patterned first masking layer and said patterned second masking layer.

REFERENCES:
patent: 5833869 (1998-11-01), Haas et al.
patent: 2005/0194352 (2005-09-01), Satoh et al.
patent: 56106412 (1981-08-01), None
patent: 56110320 (1981-09-01), None
patent: 10270967 (1998-10-01), None
patent: 11199400 (1999-07-01), None

Affiliated with

Also associated with

Rating

Method for manufacturing quartz oscillator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing quartz oscillator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing quartz oscillator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3764443