Metal working – Piezoelectric device making
Reexamination Certificate
2005-07-12
2005-07-12
Pascal, Robert (Department: 2817)
Metal working
Piezoelectric device making
C310S370000
Reexamination Certificate
active
06915548
ABSTRACT:
In method for manufacturing a quartz crystal tuning fork resonator capable of vibrating in a flexural mode, a quartz crystal wafer is etched in a first etching process to form a quartz crystal tuning fork base and quartz crystal tuning fork tines connected to the quartz crystal tuning fork base. The quartz crystal wafer is etched in a second etching process different from the first etching process to form a groove having stepped portions in at least one of opposite main surfaces of each of the quartz crystal tuning fork tines. First electrodes having a first electrical polarity are disposed on the stepped portions of the grooves of respective ones of the quartz crystal tuning fork tines. Second electrodes having a second electrical polarity opposite to the first electrical polarity are disposed on side surfaces of respective ones of the quartz crystal tuning fork tines.
REFERENCES:
patent: 3576453 (1971-04-01), Mason
patent: 4178566 (1979-12-01), Kawashima
patent: 4205248 (1980-05-01), Negita
patent: 4384232 (1983-05-01), Debely
patent: 2002/0125794 (2002-09-01), Tanaya et al.
patent: 56065517 (1981-06-01), None
patent: 00044092 (2000-07-01), None
patent: 00223992 (2000-08-01), None
Adams & Wilks
Chang Joseph
Pascal Robert
Piedek Technical Laboratory
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