Method for manufacturing probe card needles

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S842000, C430S314000, C430S315000, C430S316000

Reexamination Certificate

active

08001685

ABSTRACT:
Disclosed are probe card needles manufactured using microfabrication technology, a method for manufacturing the probe card needles, and a probe card having the probe card needles. The probe needles are manufactured by forming, on a ceramic board, probe needle bases made of conductive metal, and a polymeric elastomer layer, by using photolithography and a photoresist, and continuously depositing conductive metal layers on the probe needle bases in such a manner as to be supported by the polymeric elastomer layer. The probe card comprises: a printed circuit board (PCB) which is connected to a test head for transmitting an electrical signal from a tester; a ceramic board located below the PCB and electrically connected to the PCB by a plurality of interface pins; a jig for mechanically holding the interface pins and the multilayer ceramic board to the PCB; and a plurality of probe needles attached to the lower surface of the multilayer ceramic board and making contact with electrical/electronic devices.

REFERENCES:
patent: 4864178 (1989-09-01), Bjurling et al.
patent: 5513430 (1996-05-01), Yanof et al.
patent: 6054651 (2000-04-01), Fogel et al.
patent: 6218203 (2001-04-01), Khoury et al.
patent: 100515235 (2005-09-01), None
PCT International Search Report for PCT Counterpart Application No. PCT/KR2005/002734, mailed Apr. 18, 2006, 2 pages.
Written Opinion for PCT Counterpart Application No. PCT/KR2005/002734, mailed Apr. 18, 2006, 4 pages.

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