Method for manufacturing piezoelectric thin film resonator

Details Method for manufacturing piezoelectric thin film resonator Method for manufacturing piezoelectric thin film resonator

2005-07-26

2009-10-06

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S847000, C029S831000, C156S230000, C156S233000, C310S312000, C310S321000, C310S365000

Reexamination Certificate

active

07596840

ABSTRACT:
To provide a method for manufacturing a piezoelectric thin film resonator with excellent characteristics. A method for manufacturing a piezoelectric thin film resonator in accordance with the present invention includes a step of forming a laminated body by successively laminating, above a first substrate, a piezoelectric thin film and a first electrode, a step of bonding a second substrate and the laminated body, a step of separating the first substrate from the laminated body, a step of forming a second electrode above the piezoelectric thin film, and a step of patterning the second electrode, the piezoelectric thin film and the first electrode.

REFERENCES:
patent: 6045626 (2000-04-01), Yano et al.
patent: 6182340 (2001-02-01), Bishop
patent: 6666943 (2003-12-01), Wada et al.
patent: 6911107 (2005-06-01), Kagawa et al.
patent: 7118990 (2006-10-01), Xu et al.
patent: 2004/0163478 (2004-08-01), Xu et al.
patent: 2005/0255234 (2005-11-01), Kanda et al.
patent: 55100723 (1980-07-01), None
patent: 07-169661 (1995-07-01), None
patent: 2001-196892 (2001-07-01), None
patent: 2002-134806 (2002-05-01), None
patent: 2002-305334 (2002-10-01), None
patent: 2003-158309 (2003-05-01), None
patent: 2004-072715 (2004-03-01), None
patent: 2005-311912 (2005-11-01), None

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