Method for manufacturing piezoelectric resonator element

Details Method for manufacturing piezoelectric resonator element Method for manufacturing piezoelectric resonator element

2011-01-04

2011-01-04

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S896220, C310S312000, C310S370000, C430S314000, C216S041000, C216S057000

Reexamination Certificate

active

07861387

ABSTRACT:
A method for manufacturing a piezoelectric resonator element from a substrate made of piezoelectric material is provided. The method includes forming a first dry etching mask in a first masking region of a first surface of the substrate in a first mask forming process and performing a first dry etching process to remove a portion of the substrate in areas between the first dry etching mask after the first mask forming process. The method further includes maintaining a first un-etched portion of the substrate between the first dry etching mask after the first dry etching process and removing the first dry etching mask in a mask removing process after the first dry etching process. A wet etching process is performed to remove the first un-etched portion of the substrate after the mask removing process, thereby forming the piezoelectric resonator element.

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Saravanan et al; “Surface Micromachined Fabrication of Piezoelectric AIN Unimorph Suspension Devices for RF Resonator Applications”; 13thInternational Conference on Solid State Sensors, Actuators and Microsystems; Jun. 2005; pp. 1362-1365.

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