Method for manufacturing piezoelectric resonator

Details Method for manufacturing piezoelectric resonator Method for manufacturing piezoelectric resonator

2007-07-24

2010-12-28

Tran, Binh X (Department: 1713)

Etching a substrate: processes

Forming or treating electrical conductor article

C216S083000, C029S025350

Reexamination Certificate

active

07857983

ABSTRACT:
To provide a method for manufacturing a piezoelectric resonator which can widen the range of frequency adjustment while saving metal thereby suppressing reduction of the yields when forming a metal film for frequency adjustment at the tip of an vibrating arm. The method of manufacturing the piezoelectric resonator according to the present invention includes the steps of: bringing a substrate in which an outside shape of a piezoelectric oscillating piece is formed, into contact with an etching solution; forming grooves in a plurality of vibrating arms using a mask having an aperture at the portion corresponding to the groove, and having a metal film formed on the whole surface except the aperture; and thereafter, forming a resist mask on the surface of the substrate so that resist is left at the tip of the vibrating arms which will be a formation area of a metal film for frequency adjustment so as to remove the metal film by etching. Then, forming an electrode film after peeling off the resist film left at the tip of the vibrating arm.

REFERENCES:
patent: 2005/0116586 (2005-06-01), Tanaya et al.
patent: 2006/0082261 (2006-04-01), Tanaya
patent: 6-113704 (1994-04-01), None
patent: 2002-76806 (2002-03-01), None
patent: 2006-108824 (2006-04-01), None

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