Method for manufacturing piezo-resonator

Details Method for manufacturing piezo-resonator Method for manufacturing piezo-resonator

2006-02-28

2006-02-28

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S594000, C029S846000, C216S079000, C310S367000

Reexamination Certificate

active

07003875

ABSTRACT:
A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer20on the piezoelectric film14, a second step of coating the upper electrode layer20with a resist21and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist21and removing the upper electrode layer20other than masked portions and forming two or more first upper electrodes15a, a fourth step of removing the resist21, a fifth step of coating the first upper electrodes15awith a resist and performing patterning on the resist so that the first upper electrodes15aare partially exposed, a sixth step of etching each of the exposed first upper electrodes15aby a specified thickness to form a second upper electrode15b, and a seventh step of removing the resist22.

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patent: 2003-22074 (2003-01-01), None

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