Method for manufacturing passive device and semiconductor...

Details Method for manufacturing passive device and semiconductor... Method for manufacturing passive device and semiconductor...

2010-01-28

2010-11-23

Pham, Thanh V (Department: 2894)

Semiconductor device manufacturing: process

Making passive device

C438S108000, C438S118000, C257SE23020, C257SE27009

Reexamination Certificate

active

07838380

ABSTRACT:
A method for manufacturing passive devices and semiconductor packages using a thin metal piece is provided. According to the method, an adhesive layer is formed on a dummy substrate; a thin metal piece is bonded on the adhesive layer; a masking material is attached to the thin metal piece, a dielectric layer is formed; a masking material is attached to form metal pads; a metal pad is formed, and the formed device is attached to a lower substrate using the metal pads; the adhesive layer and the dummy substrate are removed, a masking material is attached on a surface exposed, a region where passive devices are to be formed is patterned, and the thin metal piece is etched at a predetermined depth; and solder bumps for surface mounting are formed.

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