Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1997-03-07
1999-09-14
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505732, 505412, 427596, 427 62, B05D 306, H01L 3924
Patent
active
059522712
ABSTRACT:
The method for manufacturing superconducting elements according to the present invention includes the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the target comprises a target material of a complex oxide superconducting compounds; (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material so that the target material is deposited onto a surface of the substrate, wherein the surface of the substrate maintains the position facing the surface of the target; and (c) fabricating the surface of the target material layer on the substrate to form a superconducting element by irradiating a laser beam to the surface of the substrate, without removing the substrate from the chamber. The laser beam of step (b) used to irradiate may traverse along a first optical path, and the laser beam of step (c) used for fabricating the surface of the target may traverse along a second optical path, which is not consistent with the first optical path.
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Kolinsky et al., "Laser deposition and patterning of high temperature superconducting thin films", GEC Journal of Research (1988), vol. 6, No. 3, pp. 162-169.
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Itozaki Hideo
Moto Akihiro
Nagaishi Tatsuoki
King Roy V.
Sumitomo Electric Industries Ltd.
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