Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1991-07-16
1993-06-01
Beck, Shrive
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505731, 505732, 505728, 505701, 505702, 505742, 427 62, 427 63, 427596, 4274193, 156643, 156650, 20419224, 257 33, B05D 512, H01L 3922
Patent
active
052159604
ABSTRACT:
In a method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film formed on the first thin film of oxide superconductor material, after the second thin film is deposited on the first thin film of oxide superconductor material, a multi-layer structure formed of the first and second thin films is patterned so that a side surface of the first thin film is exposed. In this condition, the whole of the substrate is heated in an O.sub.2 atmosphere or in an O.sub.3 atmosphere so that oxygen is entrapped into the first thin film of oxide superconductor material. Thereafter, the patterned multi-layer structure is preferably covered with a protection coating.
REFERENCES:
patent: 4959345 (1990-09-01), Yamazaki
Chang, "Reduced Moisture-Induced Degradation of YBaCuO Superconducting Films by Silver and High Deposition Temperatures" Appl. Phys. Lett. 53(12) Sep. 1988 pp. 1113-1115.
Iiyama Michitomo
Saitoh Mitsuchika
Tanaka Sou
Beck Shrive
King Roy V.
Sumitomo Electric Industries Ltd.
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