Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2008-06-23
2010-11-09
Garber, Charles D (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C257S040000, C438S507000
Reexamination Certificate
active
07829375
ABSTRACT:
A method for manufacturing an organic thin film transistor having excellent characteristics by a simple process, and an organic thin film transistor are provided. In a manufacture method of an organic thin film transistor element having a gate electrode, a gate insulation layer, an organic semiconductor layer and a source electrode and a drain electrode on a support, the method is characterized by comprising a step for forming an organic semiconductor precursor layer by applying a solution in which an organic semiconductor precursor is dissolved, and a step for forming an organic semiconductor layer by converting the organic semiconductor precursor to an organic semiconductor by exposing the organic semiconductor precursor layer to a discharging gas in a plasma state.
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Garber Charles D
Konica Minolta Holdings Inc.
Patel Reema
Sidley Austin LLP
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