Method for manufacturing optical waveguide using siloxane polyme

Details Method for manufacturing optical waveguide using siloxane polyme Method for manufacturing optical waveguide using siloxane polyme

1999-07-01

2000-07-11

Ullah, Akm E.

Optical waveguides

Integrated optical circuit

G02B 612

Patent

active

060884924

ABSTRACT:
An object of the invention is to provide a method of producing an optical waveguide comprising a siloxane-containing polymer film, capable of controlling a refractive index easily and finely, and an optoelectronic hybrid substrate using the optical waveguide, capable of controlling a refractive index easily and finely, and reducing the effect of the surface roughness of the substrate. In particular, it relates to a method of producing an optical waveguide comprising a siloxane-containing polymer film containing a metal obtained by the thermal polymerization of a siloxane-containing polymer film formation solution added with a metal alkoxide on a substrate, and an optoelectronic hybrid substrate comprising a combination of an optical waveguide produced as mentioned above, a photoelectric element and an electric circuit on a ceramic substrate.

REFERENCES:
patent: 5062680 (1991-11-01), Imamura et al.
patent: 5342648 (1994-08-01), MacKenxie et al.
patent: 5672672 (1997-09-01), Amano et al.
patent: 5911944 (1999-06-01), Kitaoka
patent: 5972516 (1999-10-01), Kaneko et al.

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