Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2006-02-14
2009-10-27
Le, Thao X (Department: 2892)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C264S001310, C427S163100, C205S079000, C438S048000
Reexamination Certificate
active
07608474
ABSTRACT:
A method for manufacturing an optical element having a metal wire grid containing a plurality of metal wires on a substrate includes forming the metal wire grid using an electrolytic plating process.
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Kumai Yoshitomo
Sawaki Daisuke
Harness & Dickey & Pierce P.L.C.
Jones Eric W
Le Thao X
Seiko Epson Corporation
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