Method for manufacturing optical bench, optical bench,...

Details Method for manufacturing optical bench, optical bench,... Method for manufacturing optical bench, optical bench,...

2006-10-10

2006-10-10

Ngô, Ngân V. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Groove formation

C438S421000, C438S700000, C438S701000

Reexamination Certificate

active

07118933

ABSTRACT:
An optical bench on which an optical component is mounted comprises an Si substrate made of a silicon wafer, a groove disposed on the Si substrate and designed to mount the optical component thereon, and a metal thin-film wiring for driving the optical component or a driver component. The metal thin-film wiring is formed in an electroless plating process before a groove manufacturing process which forms the groove by micromachining by means of wet processing.

REFERENCES:
patent: 6879035 (2005-04-01), Syllaios et al.
patent: 2005/0070059 (2005-03-01), Blakers et al.
patent: 2005/0269700 (2005-12-01), Farnworth et al.
patent: 2006/0009038 (2006-01-01), Cohen et al.
English language abstract of JP 2002-162542 (Jun. 7, 2002).

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