Method for manufacturing ohmic contacts having low transfer resi

Details Method for manufacturing ohmic contacts having low transfer resi Method for manufacturing ohmic contacts having low transfer resi

1988-09-23

1990-01-16

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437247, 437192, 357 71, 148DIG100, H01L 2946, H01L 21265

Patent

active

048943509

ABSTRACT:
A method for manufacturing ohmic contacts having low transfer resistances on doped semiconductor material, whereby the doping is implanted self-aligning using mask technique and the metallization is applied and, after removal of the mask layer, a temperature-time cycle occurs for simultaneous annealing the doping and alloying in the metallization.

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