Method for manufacturing multi-kind and small quantity...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C716S030000, C716S030000, C716S030000, C700S115000, C700S121000, C257SE21525, C257SE23179

Reexamination Certificate

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07062346

ABSTRACT:
A method for manufacturing multi-kind and small-quantity semiconductor products in a mass-production line and a system thereof are provided. In the method for manufacturing a semiconductor device through a plurality of fabrication processing steps, each of the chips on a wafer is controlled based on a chip identification information formed on a wafer. The method includes the step of editing the chip identification information such that the chip identification information for chips having the same fabrication processing steps and chips formed on the same wafer can be read out successively. The method also includes the step of carrying out each of the fabrication processing steps based on the chip identification information formed on the wafer by reading out the chip identification information.

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SEMI Wafer Map Data Draft Document; Doc #3101 SE; Dec. 1999.

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