Method for manufacturing magnetoresistance effect element

Coating processes – Magnetic base or coating – Magnetic coating

Reexamination Certificate

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C427S130000, C427S132000, C427S127000, C427S532000, C427S535000, C427S551000, C427S576000, C216S063000, C216S066000, C216S067000, C216S076000

Reexamination Certificate

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07897201

ABSTRACT:
A method is for manufacturing a magnetoresistance effect element having a magnetization fixed layer, a non-magnetic intermediate layer, and a magnetization free layer being sequentially stacked. The method includes: forming at least a part of a magnetic layer that is to become either one of the magnetization fixed layer and the magnetization free layer; forming a function layer including at least one of an oxide, a nitride, and a fluoride on the part of the magnetic layer; and removing a part of the function layer by exposing the function layer to either one of an ion beam and plasma irradiation.

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