Method for manufacturing liquid ejection head, substrate for...

Details Method for manufacturing liquid ejection head, substrate for... Method for manufacturing liquid ejection head, substrate for...

2005-10-20

2008-12-30

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating thermal ink jet article

Reexamination Certificate

active

07470375

ABSTRACT:
A method for precisely manufacturing a liquid supply orifice of an ink-jet recording head, even if a masking material includes pinholes which may affect the forming of the ink supply orifice, is provided. The substrate face provided with a mask used for forming the ink supply orifice has an area covered with the mask for anisotropic etching, the area consisting of a part provided with OSF layers and a part not provided with the OSF layers which are determined by considering the amount of a side etching.

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