Method for manufacturing liquid ejection head

Details Method for manufacturing liquid ejection head Method for manufacturing liquid ejection head

2007-07-31

2007-07-31

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Forming or treating thermal ink jet article

C216S002000, C216S041000, C438S021000, C438S745000, C029S890100

Reexamination Certificate

active

10868854

ABSTRACT:
A method for manufacturing a liquid ejection head having a substrate including an electro-thermal transducer for ejecting a liquid from an ejection opening, an electrode wiring section electrically connecting the electro-thermal transducer and driver element thereof, and a liquid supply port therethrough includes the steps of forming a sacrificial layer by using the same material as the electrode wiring section at a position at which the liquid supply port is to be formed during forming the electrode wiring section, forming an anti-etching layer covering the sacrificial layer, removing the sacrificial layer by etching the substrate from a surface thereof opposite to the surface on which the electro-thermal transducer is formed to expose the anti-etching layer of a portion to be the liquid supply port, and removing the exposed anti-etching layer to form the liquid supply port in the substrate.

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