Method for manufacturing liquid ejecting head

Details Method for manufacturing liquid ejecting head Method for manufacturing liquid ejecting head

2005-03-08

2005-03-08

Mills, Gregory (Department: 1763)

Etching a substrate: processes

Forming or treating thermal ink jet article

C438S021000

Reexamination Certificate

active

06863834

ABSTRACT:
A method for manufacturing a liquid ejecting head, in which liquid flow paths are defined by combining an element substrate with a nozzle member, comprises a step for preparing a material common to the element substrate as a base material of the nozzle member, a step for forming etching mask layers on first and second surfaces of the base material of the nozzle member, a step for forming a recessed portion in the second surface of the base material by patterning the mask layer on the second surface and effecting etching via the mask layer of the second surface, and a step for forming the nozzle grooves in the base material and communicating the recessed portion with the nozzle grooves by patterning the mask layer on the first surface of the base material and effecting etching via the mask layers of the first and second surfaces.

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See U.S. Appl. No. 5,278,585 (counterpart).

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