Method for manufacturing integrated circuits with a step for rep

Details Method for manufacturing integrated circuits with a step for rep Method for manufacturing integrated circuits with a step for rep

1993-11-05

1995-02-21

Fourson, George

Fishing, trapping, and vermin destroying

437923, 437 54, 437205, H01L 2100

Patent

active

053915011

ABSTRACT:
A method for manufacturing a semiconductor integrated circuit device is described. The method comprises forming a plurality of macrocells each comprising a semiconductor integrated circuit on a semiconductor layer of an SOI (silicon on insulator) substrate, subjecting an insulating film for element separation and an insulating film in the substrate to wet etching thereby removing an unnecessary macrocell, and attaching a desired macrocell separated fabricated to the removed macrocell region. The semiconductor integrated circuit device is also described, which is free of defects and has multifunction and high reliability.

REFERENCES:
patent: 4806503 (1989-02-01), Yoshida et al.

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