Method for manufacturing inkjet head

Details Method for manufacturing inkjet head Method for manufacturing inkjet head

2005-09-01

2010-06-29

Banks, Derris H (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S025350, C029S830000, C029S831000, C029S832000, C216S027000

Reexamination Certificate

active

07743503

ABSTRACT:
A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.

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