Method for manufacturing information recording medium

Details Method for manufacturing information recording medium Method for manufacturing information recording medium

1982-03-05

1983-07-26

Hoffman, James R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 40, 427 41, C11B 2300

Patent

active

043954359

ABSTRACT:
An information recording medium is manufactured while placing, in a reaction region, a substrate on the surface of which is recorded information in the form of an indented pattern and the surface of which exhibits electrical conductivity. A plasma generating gas is introduced into a plasma generating region which is isolated from the reaction region. The plasma generating gas is activated by microwaves to generate a plasma. The plasma from the plasma generating region and an organic monomer are introduced into the reaction region independently of each other to initiate polymerization of the organic monomer. A dielectric layer of a polymer of the monomer and of a uniform, small thickness is formed along the indented pattern of the target.

REFERENCES:
patent: 4018945 (1977-04-01), Mehalso

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