Radiation imagery chemistry: process – composition – or product th – Holographic process – composition – or product
Reexamination Certificate
2007-05-25
2011-11-08
Angebranndt, Martin (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Holographic process, composition, or product
C430S002000, C430S311000, C359S015000, C359S012000, C359S032000
Reexamination Certificate
active
08053145
ABSTRACT:
To provide a method for manufacturing a holographic recording medium and a method for manufacturing a semiconductor device, by which effects of distortion or irregularities of the surface of an exposure object can be reduced. The method includes the steps of: splitting a laser beam emitted from a laser oscillator into a first laser beam and a second laser beam, and forming a fringe pattern in a holographic recording medium by illuminating the holographic recording medium with the first laser beam through a mask and illuminating the holographic recording medium with the second laser beam. The mask is a substrate having a light-shielding film formed over its surface.
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Angebranndt Martin
Costellia Jeffrey L.
Nixon & Peabody LLP
Semiconductor Energy Laboratory Co,. Ltd.
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