Method for manufacturing functional thin film

Details Method for manufacturing functional thin film Method for manufacturing functional thin film

1991-04-22

1993-02-16

Bell, Janyce

Coating processes

Magnetic base or coating

Magnetic coating

427130, 4272481, 427250, 4272551, 427294, 427295, 427348, 427349, 427377, B05D 512

Patent

active

051869772

ABSTRACT:
In a method for manufacturing a functional thin film by a vacuum evaporation method, during a thin film containing a material is evaporation-deposited on a substrate, a gas flow controls orientation of the material in a manner that the gas flow substantially intersects direction of flow of vapor of said material onto the substrate.

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