Fishing – trapping – and vermin destroying
Patent
1994-07-18
1995-05-30
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437228, 437950, H01L 21266
Patent
active
054200547
ABSTRACT:
An FEA having a novel structure using an n.sup.+ shallow junction region, which operates with small voltages and increases emission current and a method for manufacturing the same. A tip is formed on a first conductive type semiconductor substrate, a first impurity region having a high impurity concentration is formed in the upper portion of the semiconductor substrate wherein first conductive type impurities are implanted, and a second conductive type second impurity region is formed in the surface of the semiconductor substrate around the tip and on the first impurity region. Also, a second conductive type shallow junction region is formed in the surface portion of the tip, an insulation layer including a pin hole which exposes the tip is formed on the semiconductor substrate, and a conductive layer having an opening corresponding to the pin hole of the insulation layer is formed on the insulation layer. When electrons are emitted by a tunneling effect, the required voltages to be applied are lowered. Since the tip can be manufactured by a self-aligned manner, the manufacturing process becomes simplified.
REFERENCES:
patent: 3970887 (1976-07-01), Smith et al.
patent: 4513308 (1985-04-01), Greene et al.
patent: 5266530 (1993-11-01), Bagley et al.
patent: 5358908 (1994-10-01), Reinberg et al.
Jung Y. EA, et al., Silicon Avalanche Cathodes and Their Characteristics, Oct. 1991, vol. 38 pp. 2377-2382.
Choi Sun-jeong
Lee Gang-ok
Chaudhari Chandra
Hearn Brian E.
Samsung Display Devices Co. Ltd.
LandOfFree
Method for manufacturing field emitter array does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for manufacturing field emitter array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing field emitter array will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-361263