Method for manufacturing field emission display device

Details Method for manufacturing field emission display device Method for manufacturing field emission display device

1996-09-18

1998-06-23

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 24, 313309, H01J 130, H01J 918

Patent

active

057696799

ABSTRACT:
In a method, a film for a gate electrode, exposed through the sidewall of a trench, is thermally treated to grow a thermal oxide film which is, then, removed at the lateral side of the gate electrode, to spatially separate the gate electrode from the gate insulating film in space. This method precisely controls the thermal oxide film formed at the lateral side of the gate electrode, so that the distance between the gate electrode and the electron emission cathode can be accurately adjusted. The electron emission cathodes are homogeneous in shape. Also, the reliability of the display can be improved since a silicide metal is formed on the electron emission cathodes.

REFERENCES:
patent: 5302238 (1994-04-01), Roe et al.
patent: 5382185 (1995-01-01), Gray et al.
patent: 5457355 (1995-10-01), Fleming et al.
patent: 5584740 (1996-12-01), Hsu et al.

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