Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate
2006-01-10
2006-01-10
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Semiconductor substrate dicing
C438S113000
Reexamination Certificate
active
06984572
ABSTRACT:
An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.
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Hayashi Michihiko
Nakatani Masaya
Tajika Hirofumi
Le Dung A.
Matsushita Electric - Industrial Co., Ltd.
Wenderoth , Lind & Ponack, L.L.P.
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