Method for manufacturing electron-emitting device, methods...

Details Method for manufacturing electron-emitting device, methods... Method for manufacturing electron-emitting device, methods...

2005-06-13

2009-08-11

Patel, Nimeshkumar D. (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

C445S050000, C445S051000

Reexamination Certificate

active

07572164

ABSTRACT:
A method for manufacturing a precursor to an electron-emitting device includes the steps of preparing an electron-emitting member, and alternately exposing the electron-emitting member to an oxygen-containing gas and a metal-containing gas.

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Hausmann et al.,Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors, Chem. Mater. vol. 14, No. 10, 2002, pp. 4350-4358.

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