Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate
2006-10-10
2006-10-10
Smoot, Stephen W. (Department: 2813)
Semiconductor device manufacturing: process
Chemical etching
Liquid phase etching
C438S756000, C438S787000, C134S015000, C216S092000
Reexamination Certificate
active
07119027
ABSTRACT:
Where a thin film formed on a glass substrate is etched with a solution containing a fluoride, insoluble residues formed by the reaction of the solution with glass substrate components adhere to the back of the substrate to cause etching non-uniformity called roller marks. So, a solution is supplied directly to supporting members for supporting the glass substrate, or concentratedly to a region where the substrate and the supporting members come into contact and from a position opposite to the transporting direction of the substrate, or to both the supporting members and regions where the substrate and the supporting members come into contact. This enables the roller marks to be kept from forming, consequently making it possible to improve display quality of display devices.
REFERENCES:
patent: 6062288 (2000-05-01), Tateyama
patent: 6290865 (2001-09-01), Lloyd et al.
patent: 6444255 (2002-09-01), Nagahara et al.
patent: 6827814 (2004-12-01), Taniyama et al.
patent: 2004/0074601 (2004-04-01), Lee et al.
patent: 2005/0034742 (2005-02-01), Saito et al.
patent: 10079371 (1998-03-01), None
patent: 2000-228526 (2000-08-01), None
patent: 2000-303191 (2000-10-01), None
patent: 2003-092284 (2003-03-01), None
Iso et al., “Wet Etching Treatment Method and Device,” English translation of JP 10-79371 A, Japan Patent Office, patent application published on Mar. 23, 1998.
Kaneko Toshiki
Ohsawa Toshiyuki
Sonoda Daisuke
Takahara Yoichi
Antonelli, Terry Stout and Kraus, LLP.
Hitachi Displays Ltd.
Smoot Stephen W.
LandOfFree
Method for manufacturing display device that includes... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for manufacturing display device that includes..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing display device that includes... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3691749