Radiation imagery chemistry: process – composition – or product th – Post imaging processing – Physical developing
Patent
1985-03-12
1987-04-28
Corbin, John K.
Radiation imagery chemistry: process, composition, or product th
Post imaging processing
Physical developing
350166, 35016217, 430299, G02B 518
Patent
active
046609342
ABSTRACT:
A method for manufacturing diffraction grating, in which after forming, on a substrate, one of a negative type photoresist film (an N film) and a positive type photoresist film (a P film) to cover a first region A and the other of the negative type photoresist film and the positive type photoresist film, or the latter film on the former one to cover a second region B, the first region and the second region are subjected to two-beam interference exposure, thereby forming a diffraction grating in which corrugations in the first region and the second region are reverse in phase to each other, through utilization of characteristics of the negative type photoresist film and the positive type photoresist film. Another feature of the present invention resides in that after forming, on a substrate, a structure in which a negative type photoresist film (an N film) is formed to cover only a first region A and the negative type photoresist film is formed on a positive type photoresist film (a P film) to cover a second region B, the first region and the second region of the substrate are subjected to two-beam interference exposure, thereby forming a diffraction grating in which corrugations in the first region and the second region are reverse in phase to each other, through utilization of characteristics of the negative type photoresist film and the positive type photoresist film.
REFERENCES:
patent: 3510371 (1970-05-01), Frankson
patent: 4140362 (1979-02-01), Tien
patent: 4297436 (1981-10-01), Kubotera et al.
patent: 4313648 (1982-02-01), Yano et al.
patent: 4410237 (1983-10-01), Veldkamp
Akiba Shigeyuki
Matsushima Yuichi
Sakai Kazuo
Utaka Katsuyuki
Adams Bruce L.
Ben Loha
Burns Robert E.
Corbin John K.
Kokusai Denshin Denwa Kabushiki Kaisha
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