Method for manufacturing conductive pattern substrate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material

Reexamination Certificate

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Details

C438S597000, C438S616000, C438S669000, C438S671000, C438S942000, C438S945000, C438S948000

Reexamination Certificate

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06872646

ABSTRACT:
A conductive pattern is obtained by forming concave-convex on a substrate by using a pattern substrate. A conductive thin layer is formed and then coated with a layer of a photosensitive resin. The photo sensitive resin is exposed and development by using the pattern substrate to bare the conductive thin layer on the convex portion and electrolytic plating. The conductive thin layer and the layer of the photosensitive resin on the concave portion may then be removed.

REFERENCES:
patent: 5447767 (1995-09-01), Tanabe et al.
patent: 5492863 (1996-02-01), Higgins, III
patent: 5981866 (1999-11-01), Edelson
patent: 6063701 (2000-05-01), Kuwazaki et al.
patent: 6239356 (2001-05-01), Edelson
patent: 6645856 (2003-11-01), Tanaka et al.
patent: 6653232 (2003-11-01), Uda et al.

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