Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2005-03-29
2005-03-29
Gurley, Lynne A. (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C438S597000, C438S616000, C438S669000, C438S671000, C438S942000, C438S945000, C438S948000
Reexamination Certificate
active
06872646
ABSTRACT:
A conductive pattern is obtained by forming concave-convex on a substrate by using a pattern substrate. A conductive thin layer is formed and then coated with a layer of a photosensitive resin. The photo sensitive resin is exposed and development by using the pattern substrate to bare the conductive thin layer on the convex portion and electrolytic plating. The conductive thin layer and the layer of the photosensitive resin on the concave portion may then be removed.
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Dia Nippon Printing Co., Ltd.
Gurley Lynne A.
Keefer Timothy J.
Seyfarth Shaw LLP
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