Method for manufacturing compound semiconductor wafer and...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Mesa or stacked emitter

Reexamination Certificate

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Details

C438S312000, C438S317000, C257SE29030, C257SE29114

Reexamination Certificate

active

10524013

ABSTRACT:
A method for producing a compound semiconductor wafer used for production of HBT by vapor growth of a sub-collector layer, a collector layer, a base layer and an emitter layer in this turn on a compound semiconductor substrate using MOCVD method wherein the base layer is grown as a p-type compound semiconductor thin film layer containing at least one of Ga, Al and In as a Group III element and As as a Group V element under such growth conditions that the growth rate gives a growth determined by a Group V gas flow rate-feed.

REFERENCES:
patent: 2001/0026971 (2001-10-01), Fujita et al.
patent: 2002/0163014 (2002-11-01), Welser et al.
patent: 390552 (1990-10-01), None
patent: 977245 (2000-02-01), None
patent: 57-92526 (1982-06-01), None
patent: 3-110829 (1991-05-01), None
patent: 6-236852 (1994-08-01), None

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