Method for manufacturing chalcopyrite film

Details Method for manufacturing chalcopyrite film Method for manufacturing chalcopyrite film

1995-04-11

1997-05-27

Bareford, Katherine A.

Coating processes

Measuring, testing, or indicating

427 74, 427250, 4272552, C23C 1652, C23C 1606

Patent

active

056330332

ABSTRACT:
A method for manufacturing an ABC.sub.2 chalcopyrite film (wherein A represents Cu or Ag, B represents In, Ga or Al, C represents S, Se or Te) comprises; a first step of forming a film of a composition of ABC.sub.2 containing element A in excess; a second step of exposing the film formed in the first step to a flux or gas containing element B and C, or to a gas or flux containing element A, B and C but containing element B in excess; and monitoring an electrical or optical property of the film in order to determine an end point of the second step where the electrical or optical property of the film demonstrates a specific change.

REFERENCES:
patent: 4335266 (1982-06-01), Mickelsen et al.
patent: 4543576 (1985-09-01), Hieber et al.
patent: 4783373 (1988-11-01), Baumeister et al.
patent: 5151295 (1992-09-01), Kawahara et al.
patent: 5200021 (1993-04-01), Kawai et al.
patent: 5241366 (1993-08-01), Bevis et al.
patent: 5260772 (1993-11-01), Pollak et al.
patent: 5403433 (1995-04-01), Morrison et al.
R.A. Mickelsen et al.; "Development of Thin-Film CuInSe.sub.2 Solar Cells"; ICTMC7;, High Technology Center; pp. 39-47; (1986) (month unknown).

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