Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1992-06-23
1994-02-08
King, Roy
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505730, 505734, 427 62, 427564, 427575, 427576, 4272552, 4272553, 4271263, B05D 306, B05D 512, C23C 1600
Patent
active
052848248
ABSTRACT:
A method for manufacturing an oxide superconductor film is disclosed, which comprises the steps of: preparing a substrate; depositing an oxide superconductor film on said substrate by chemical vapor deposition (CVD); and supplying excited oxygen to or near a film deposition site on said substrate during the deposition of said film.
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Terashima et al, "Single-crystal YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films by activated Reactive Evaporation", Jpn. J. Appl. Phys. 27(1) Jan. 1988 L91-93.
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S. Witanachchi et al., "Deposition of superconducting Y-Ba-Cu-O films at 400.degree. C without post-annealing", Appl. Phys. Lett. 53(3), 18 Jul. 1988, pp. 234-236.
Applied Physics Letter 52(9) pp. 754-756, X. D. Wu, et al, Feb. 1988 "Low-temperature preparation of high T.sub.c superconducting thin films".
Applied Physics Letter, 52(4), pp. 320-322, L. Lynds, et al, Jan. 1988, "Superconducting thin films of Y-Ba-Cu-O produced by neodymium:yttrium".
Applied Physics Letter, 51(8), pp. 619-621, D. Dijkkamp et al., Aug. 1987, "Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T.sub.c bulk material".
Hayashi Kazuo
Morimiya Osami
Noda Etsuo
Suzuki Setsuo
Kabushiki Kaisha Toshiba
King Roy
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