Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se
Patent
1996-05-20
1998-08-04
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Producing josephson junction, per se
505193, 505325, 505410, 505702, 505728, 427 62, 427 63, H01L 3924
Patent
active
057893462
ABSTRACT:
Method for manufacturing a superconducting device including forming on a surface of a substrate a non-superconducting oxide layer, a first oxide superconductor thin film, etching the first oxide superconductor thin film so as to form a concave portion, implanting ions to the first oxide superconductor thin film at the bottom of the concave portion so as to form an insulating region such that the first oxide superconductor thin film is divided into two superconducting regions by the insulating region, and forming a second oxide superconductor thin film on the insulating region and the two superconducting regions, which is continuous to the two superconducting regions.
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Tarutani, Y., et al., "Superconducting characteristics of a Planar-type HoBa.sub.2 Cu.sub.3 O.sub.7-.times. -La.sub.1.5 Ba.sub.1.5 Cu.sub.3 O.sub.7-y -HoBa.sub.2 Cu.sub.3 O.sub.7-.times. junction", Applied Physics Letters, vol. 58, No. 23, pp. 2707-2709, Jun. 10, 1991.
Moore, D. F., et al., "Superconducting Thin Films for Device Applications (Invited), 2nd Workshop on High Temperature Superconducting Electron Devices", pp. 281-284, Jun. 7-9, 1989.
Wu et al., "High Critical Currents In Exitaxial YBaCuO Thin Films on Silicon With Buffer Layers, " Appl. Phys. Lett., vol. 54, No. 8, 20 Feb. 1989, pp. 754-756. 15, 15 Apr. 1991, pp. 1682-1684.
Iiyama Michitomo
Inada Hiroshi
Nakamura Takao
King Roy V.
Sumitomo Electric Industries Ltd.
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