Method for manufacturing an organic electroluminescent display d

Details Method for manufacturing an organic electroluminescent display d Method for manufacturing an organic electroluminescent display d

1997-04-23

1999-09-14

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Making emissive array

438 34, 438 99, 257 40, 257 88, 257 89, H01L 2100

Patent

active

059535857

ABSTRACT:
A method for manufacturing an organic electroluminescent display device including one or more organic electroluminescent elements arranged on a light-permeable substrate, each element having a cathode, an emitting layer made of one or more organic substances and an anode is capable of forming, at a high accuracy, an emitting layer with various patterns. The method includes the steps of: layering the anode material with a pattern on a light-permeable substrate; layering secondly in turn the one or more organic substances, the cathode material, the protective layer on the anode material and the light-permeable substrate; layering thirdly a resist layer on the layered protective layer to pattern the layered resist layer with a shape corresponding to the emitting layer; dry-etching the layered anode material, the layered one or more organic substances, the layered cathode material and the layered protective layer in accordance with the pattern of the resist layer; and repeating the second and third layering steps and the dry-etching step to make an arrangement of the one or more organic electroluminescent elements.

REFERENCES:
patent: 5294870 (1994-03-01), Tang et al.
patent: 5334539 (1994-08-01), Shinar et al.
patent: 5399502 (1995-03-01), Friend et al.
patent: 5424560 (1995-06-01), Norman et al.
patent: 5459082 (1995-10-01), Jeong
patent: 5721160 (1998-02-01), Forrest et al.

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