Method for manufacturing an internally shielded dynamic random a

Details Method for manufacturing an internally shielded dynamic random a Method for manufacturing an internally shielded dynamic random a

1993-04-14

1994-10-04

Fourson, George

Fishing, trapping, and vermin destroying

437 60, 437919, H01L 2170

Patent

active

053526210

ABSTRACT:
In the manufacturing process of a Dynamic Random Access Memory cell, the conducting layer used for preventing the capacitive coupling between a bit line and a word line is formed over the surface of the entire memory cell excepting the contact legion of a bit line and a storage electrode. Moreover, as the conducting layer used for preventing the capacitive coupling is used as an etching barrier in the etching process forming a contact hole, self-aligned contacts are formed. Therefore, the operation of the unwanted cell of a Dynamic Random Access Memory cell caused by the capacitive coupling is protected and a highly integrated Dynamic Random Access Memory cell is manufactured.

REFERENCES:
patent: 5114873 (1992-05-01), Kim et al.
patent: 5140389 (1992-08-01), Kimura et al.

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