Method for manufacturing an ink jet head having an improved disc

Details Method for manufacturing an ink jet head having an improved disc Method for manufacturing an ink jet head having an improved disc

1992-10-30

1995-08-22

Powell, William A.

Etching a substrate: processes

Forming or treating thermal ink jet article

216 67, 216 51, B44C 122

Patent

active

054436877

ABSTRACT:
A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.

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