Method for manufacturing an electrostatic chuck

Details Method for manufacturing an electrostatic chuck Method for manufacturing an electrostatic chuck

2006-01-17

2006-01-17

Walls, Dionne A. (Department: 1731)

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

Of electrical article or electrical component

C264S618000, C264S658000

Reexamination Certificate

active

06986865

ABSTRACT:
A method for manufacturing an electrostatic chuck is disclosed wherein a sintered ceramic body having a dielectric layer made from Alumina (Al2O2) and Titanium Nitride (TiN) having a specific range of particle size is heat treated in an oxygen-rich environment in order to produce a uniform dielectric layer having no pores or micro-cracks.

REFERENCES:
patent: 5104834 (1992-04-01), Watanabe et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5207437 (1993-05-01), Barnes et al.
patent: 5382469 (1995-01-01), Kubota et al.
patent: 5535507 (1996-07-01), Barnes et al.
patent: 5566043 (1996-10-01), Kawada et al.
patent: 5583737 (1996-12-01), Collins et al.
patent: 5600530 (1997-02-01), Smith
patent: 5607541 (1997-03-01), Kubota et al.
patent: 5634266 (1997-06-01), Sherstinsky et al.
patent: 5671117 (1997-09-01), Sherstinsky et al.
patent: 5748436 (1998-05-01), Honma et al.
patent: 5864459 (1999-01-01), Lu et al.
patent: 5867359 (1999-02-01), Sherman
patent: 5880922 (1999-03-01), Husain
patent: 5903428 (1999-05-01), Grimard et al.
patent: 5905626 (1999-05-01), Logan et al.
patent: 5909354 (1999-06-01), Harada et al.
patent: 5909355 (1999-06-01), Parkhe
patent: 5946183 (1999-08-01), Yamada et al.
patent: 6001760 (1999-12-01), Katsuda et al.
patent: 6017485 (2000-01-01), Enck et al.
patent: 6028762 (2000-02-01), Kamitani
patent: 6051303 (2000-04-01), Katsuda et al.
patent: 6108189 (2000-08-01), Weldon et al.
patent: 6122159 (2000-09-01), Arai et al.
patent: 6134096 (2000-10-01), Yamada et al.
patent: 6141203 (2000-10-01), Sherman
patent: 6215642 (2001-04-01), Sogard
patent: 6268994 (2001-07-01), Logan et al.
patent: 6272002 (2001-08-01), Mogi et al.
patent: 6310755 (2001-10-01), Kholodenko et al.
patent: WO01/43184 (2001-06-01), None

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