Method for manufacturing an electrically conductive tip composed

Details Method for manufacturing an electrically conductive tip composed Method for manufacturing an electrically conductive tip composed

1991-12-06

1993-02-23

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437927, 437958, 445 49, 445 50, 313309, 148DIG50, H01L 2120, H01L 21465

Patent

active

051889773

ABSTRACT:
For manufacturing an electrically conductive tip composed of a doped semiconductor material, a mask layer is produced on a substrate composed of the semiconductor material. This mask layer contains a material at least at its surface and directly on the substrate whereon the semiconductor material does not grow in a selective epitaxy. An opening wherein the surface of the substrate lies exposed is produced in the mask layer. The electrically conductive tip is produced by a selective epitaxy on the exposed surface of the substrate such that the layer growth in the direction parallel to the surface of the substrate is lower than in the direction perpendicular to the surface of the substrate.

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