Method for manufacturing an array of thin film actuated mirrors

Details Method for manufacturing an array of thin film actuated mirrors Method for manufacturing an array of thin film actuated mirrors

1995-06-06

1996-11-26

Callahan, Timothy P.

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359224, 359291, 359900, 29 2535, 310328, 310366, G02B 2600

Patent

active

055791794

ABSTRACT:
An improved method for manufacturing an array of M.times.N thin film actuated mirrors comprises the steps of: providing a base having a flat top surface; forming sequentially a separation layer, a first thin film layer, and a thin film electrodisplacive layer on the top surface of the base; heat treating the thin film electrodisplacive layer to allow a phase transition to take place; forming sequentially a second thin film layer, a elastic layer, and a thin film sacrificial layer on top of the thin film electrodisplacive layer; forming an array of M.times.N empty slots to the sacrificial layer; forming a supporting layer on top of the sacrificial layer; forming an array of M.times.N conduits, each of the conduits passing through the supporting layer and each of the empty slots to thereby form a multilayer structure; forming an array of M.times.N transistors on top of the multilayer structure to thereby form a semifinished actuated mirror structure; attaching an active matrix to the semifinished actuated mirror structure; separating the base from the semifinished actuated mirror structure by removing the separation layer to thereby form an actuated mirror structure; patterning the actuated mirror structure into an array of M.times.N semifinished actuated mirrors; and removing the thin film sacrificial layer to thereby form the array of M.times.N thin film actuated mirrors.

REFERENCES:
patent: 5159225 (1992-10-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5505807 (1996-04-01), Min et al.
patent: 5506720 (1996-04-01), Yoon

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