Method for manufacturing an array of thin film actuated mirrors

Details Method for manufacturing an array of thin film actuated mirrors Method for manufacturing an array of thin film actuated mirrors

1995-12-13

1998-06-30

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359223, 359850, 359900, G02B 2600

Patent

active

057742561

ABSTRACT:
A method for manufacturing an array of M.times.N thin film actuated mirrors includes the steps of: providing an active matrix; forming a thin film sacrificial layer; creating an array of empty slots with sharp edges in the thin film sacrificial layer; rounding off the sharp edges; forming supporting members; depositing an elastic layer; forming conduits; forming a second thin film layer; depositing a thin film electrodisplacive layer; patterning the thin film electrodisplacive and the second thin film layers into an array of thin film electrodisplacive members and second thin film electrodes; depositing an insulating layer; patterning the insulating and the elastic layers into an array of insulating and elastic members; removing the thin film sacrificial layer, thereby providing driving spaces; forming a photoresist layer, the photoresist also filling the driving spaces; removing the photoresist layer and the insulating members formed on top of each of the thin film electrodisplacive members; and forming a first thin film electrode on top of each of the thin film electrodisplacive members thereby forming the array of M.times.N thin film actuated mirrors.

REFERENCES:
patent: 5172262 (1992-12-01), Hornbeck

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