Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-12-17
1999-07-06
Achutamurthy, Ponnathapura
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359291, 359221, 359846, 359855, 310328, 310366, G02B 2600, G02B 2608, G02B 508
Patent
active
059204222
ABSTRACT:
A method for manufacturing an array of thin film actuated mirrors capable of ensuring an optimum optical efficiency is disclosed. The method includes the steps of: forming a thin film sacrificial layer on top of an active matrix; forming an array of semifinished actuating structures on top of the thin film sacrificial layer, wherein each of the semifinished actuating structures includes a thin film electrodisplacive member, a second thin film electrode and an elastic member; forming selectively a polymer layer; depositing a first thin film layer on top of each of the semifinished actuating structures; removing the polymer layer, thereby forming an array of actuating structures, each of the actuating structures having a first thin film electrode and the semifinished actuating structure; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors. Since the formation of the array of semifinished actuating structures is followed by the formation of the first thin film electrode, it may prevent the first thin film electrode, which also functions as a mirror, from chemically or physically damaged during the formation of the array of semifinished actuating structures, thereby ensuring the optical efficiency of the array of thin film actuated mirrors.
Achutamurthy Ponnathapura
Daewoo Electronics Co. Ltd.
Ponnaluri P.
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