Method for manufacturing acceleration sensing unit

Details Method for manufacturing acceleration sensing unit Method for manufacturing acceleration sensing unit

2011-06-07

2011-06-07

Banks, Derris H (Department: 3729)

Metal working

Piezoelectric device making

C029S417000, C029S594000, C029S827000, C029S830000, C029S832000, C438S015000, C438S025000, C438S050000, C438S067000, C438S461000, C181S171000, C181S172000, C073S001370, C073S001380, C073S488000, C310S31300R, C310S31300R, C310S329000

Reexamination Certificate

active

07954215

ABSTRACT:
A method for manufacturing an acceleration sensing unit includes: providing an element support substrate in which a plurality of element supporting members is arranged so as to form a plane, each of the element supporting members being coupled to the other element supporting member through a supporting part and having a fixed part and a movable part that is supported by the fixed part through a beam, the beam having a flexibility with which the movable part is displaced along an acceleration detection axis direction when an acceleration is applied to the movable part; providing an stress sensing element substrate in which a plurality of stress sensing elements is arranged so as to form a plane, each of the stress sensing elements being coupled to the other stress sensing element through an element supporting part and having a stress sensing part and fixed ends that are formed so as to have a single body with the stress sensing part at both ends of the stress sensing part; disposing the stress sensing element substrate on the element support substrate such that the fixed ends of each stress sensing element are situated on the fixed part and the movable part; fixing the fixed ends onto the fixed part and the movable part, and dividing the element supporting part and the supporting part.

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