Fishing – trapping – and vermin destroying
Patent
1989-04-27
1990-08-21
Hearn, Brian E.
Fishing, trapping, and vermin destroying
148DIG26, 148DIG95, 156613, 372 50, 437 81, 437 89, 437133, 437970, H01L 2120
Patent
active
049506226
ABSTRACT:
A method for manufacturing a surface emitting type AlGaAs/GaAs semiconductor LASER diode by a selective epitaxy method which is capable of forming naturally a 45.degree. mirror reflective face during the epitaxy method itself. The method comprises the steps of forming a silicon oxide or silicon nitride layer on one side of a n-type single crystal GaAs substrate as a mask, removing the mask of the regions each for forming a 45.degree. mirror reflective face and a LASER diode by use of a photolithography and a chemicaletching, forming the two layers by removing the photoresistor on the remaining mask after a selective epitaxy process and converting a slant face of the LASER diode into a vertical face, depositing a n-type metal layer on the other side of the substrate, and carrying out a heat treatment.
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Kwon Young Se
Yoo Tae Kyung
Bunch William D.
Hearn Brian E.
Korea Advanced Institute of Science and Technology
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