Metal working – Piezoelectric device making
Reexamination Certificate
2007-01-17
2009-02-03
Vo, Peter (Department: 3729)
Metal working
Piezoelectric device making
C029S830000, C029S831000, C029S832000, C029S846000, C029S847000, C310S31300R
Reexamination Certificate
active
07484280
ABSTRACT:
A method for manufacturing a surface acoustic wave element having an interdigital transducer (IDT) electrode formed on a semiconductor substrate includes a) forming an insulation layer on a surface of an active side of the semiconductor substrate, b) forming a base layer on a whole surface of the insulation layer, c) planarizing a surface of the base layer, d) forming a piezoelectric member on a planarized surface of the base layer, e) forming the IDT electrode on a surface of the piezoelectric member, and f) forming a bank being higher than a height from the surface of the base layer to the surface of the IDT electrode on a peripheral of the surface of the base layer so as to surround the piezoelectric member.
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Higuchi Takamitsu
Kasuya Yoshikazu
Yajima Aritsugu
Nguyen Tai
Oliff & Berridg,e PLC
Seiko Epson Corporation
Vo Peter
LandOfFree
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