Method for manufacturing a surface acoustic wave device...

Details Method for manufacturing a surface acoustic wave device... Method for manufacturing a surface acoustic wave device...

2005-03-15

2005-03-15

Arbes, Carl J. (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C029S827000

Reexamination Certificate

active

06865786

ABSTRACT:
In a method of manufacturing a surface acoustic wave device using a Shear Horizontal type surface acoustic wave, at least one interdigital transducer (IDT) is made of a material having a larger mass-load effect than that of aluminum. The metallization ratio of the IDT and the normalization film thickness h/λ of the IDT are controlled such that ripple caused by a transversal mode wave is about 1.5 dB or less, where “h” indicates the film thickness of the electrodes and “h” indicates the wavelength of a surface acoustic wave.

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